CMP Process Materials

In Maxwaytec Engineering, we have more than 10 years working experiences in CMP process, this include provides CMP machine overhaul and supplying CMP process materials.  Chemical Mechanical Planarization (CMP) is a critical process in order to determine smooth surface requirements.

CMP Materials

Maxwaytec Engineering offers 2 key materials for CMP process, namely

  1. Slurry
  2. CMP pad

Both commodities serve the key process materials which direct impact the product quality.  Since we are very close to our customers, we are able to provide a product developing in order to upgrade our product range to suit for next generation surface quality.

CMP Pad Materials

CMP pad

Currently, we have CMP-600 and CMP-800 pad for the semiconductor industry.   Both designed pads are considered hard pad which very suitable for process who requires better stock removal.

The CMP-600 pad comes with a 10*10mm groove pattern.  In general, we are seeing some advantages for using the grooved pad on a CMP process which required higher stock removal.  This is due to

  1. The groove is acted as an effective channel for debris discharge.
  2. Able to increase higher slurry flow rate
  3. Increase stock removal rate

Furthermore, both the CMP-600 & CMP-800 pad work fine with Silicon oxide base slurry.  We user may not have broad range of CMP pad portfolio, but both our pads are sufficient for most application.

Slurry uses in CMP Process

Colloidal Silica Solution

Slurry plays an important role in a CMP process.  The CMP pad may contribute mainly on mechanical effect, however, the slurry contribute both in mechanical and chemical effect.  The slurry particle abrasive will direct contribute the removal rate mechanically, and the slurry solution base will contribute the etching effect from chemical perspective.

We have 2 major groups of slurry available:

  1. Silicon Oxide base slurry
  2. Colloidal silica base slurry

Both type of slurry have been proof in achieving better surface appearance and lower surface defective rate. 

Kindly talk to Maxwaytec for your CMP process material needs.

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